Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8987645 | Substrate processing apparatus having rotatable slot-type antenna and method of manufacturing semiconductor device using the same | Unryu Ogawa, Masahisa Okuno, Tokunobu Akao, Shinji Yashima, Atsushi UMEKAWA | 2015-03-24 |
| 8557720 | Substrate processing apparatus and method of manufacturing a semiconductor device | Tokunobu Akao, Unryu Ogawa, Masahisa Okuno, Shinji Yashima, Atsushi UMEKAWA | 2013-10-15 |
| 8486222 | Substrate processing apparatus and method of manufacturing a semiconductor device | Tokunobu Akao, Unryu Ogawa, Masahisa Okuno, Shinji Yashima, Atsushi UMEKAWA | 2013-07-16 |