Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12050138 | Substrate processing apparatus, and thermocouple | Akihiro Osaka, Hideto Yamaguchi, Tetsuya Kosugi, Atsushi UMEKAWA, Motoya Takewaki | 2024-07-30 |
| 11906367 | Substrate temperature sensor, substrate retainer and substrate processing apparatus | Hitoshi Murata, Akinori Tanaka, Masaaki Ueno | 2024-02-20 |
| D976129 | Temperature sensor | Tetsuya Kosugi | 2023-01-24 |
| D973520 | Temperature sensor | — | 2022-12-27 |
| 11300456 | Substrate processing apparatus, and thermocouple | Akihiro Osaka, Hideto Yamaguchi, Tetsuya Kosugi, Atsushi UMEKAWA, Motoya Takewaki | 2022-04-12 |
| D924701 | Temperature sensor | — | 2021-07-13 |
| 10684174 | Substrate processing apparatus, and thermocouple | Akihiro Osaka, Hideto Yamaguchi, Tetsuya Kosugi, Atsushi UMEKAWA, Motoya Takewaki | 2020-06-16 |
| 10228291 | Substrate processing apparatus, and thermocouple | Akihiro Osaka, Hideto Yamaguchi, Tetsuya Kosugi, Atsushi UMEKAWA, Motoya Takewaki | 2019-03-12 |
| D819463 | Protector tube for thermocouple | Atushi Umekawa, Masaaki Ueno, Tetsuya Kosugi, Hitoshi Murata, Masashi Sugishita +1 more | 2018-06-05 |
| D818850 | Protector tube for thermocouple | Atushi Umekawa, Masaaki Ueno, Tetsuya Kosugi, Hitoshi Murata, Masashi Sugishita +1 more | 2018-05-29 |
| D803075 | Thermometry tool for substrate processing apparatus | Motoya Takewaki, Akihiro Osaka, Masaaki Ueno, Tetsuya Kosugi, Masashi Sugishita | 2017-11-21 |
| 8987645 | Substrate processing apparatus having rotatable slot-type antenna and method of manufacturing semiconductor device using the same | Unryu Ogawa, Masahisa Okuno, Shinji Yashima, Atsushi UMEKAWA, Kaichiro MINAMI | 2015-03-24 |
| 8795433 | Substrate processing apparatus | Kazuyoshi Yamamoto | 2014-08-05 |
| 8557720 | Substrate processing apparatus and method of manufacturing a semiconductor device | Unryu Ogawa, Masahisa Okuno, Shinji Yashima, Atsushi UMEKAWA, Kaichiro MINAMI | 2013-10-15 |
| 8486222 | Substrate processing apparatus and method of manufacturing a semiconductor device | Unryu Ogawa, Masahisa Okuno, Shinji Yashima, Atsushi UMEKAWA, Kaichiro MINAMI | 2013-07-16 |
| 6742977 | Substrate processing device, substrate conveying device, and substrate processing method | Satohiro Okayama, Motoichi Kanazawa, Takeshige Ishida, Tomohiko Takeda, Yukio Akita +4 more | 2004-06-01 |
| 5957651 | Substrate carrying apparatus | Yuji Takebayashi, Yoshikazu Konno | 1999-09-28 |
| 5850071 | Substrate heating equipment for use in a semiconductor fabricating apparatus | Issei Makiguchi, Katsuyoshi Hamano | 1998-12-15 |