Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9595418 | Ion beam irradiation device | Yoshiaki Yamamoto, Young-Doo Kim, Yoshinori Obise | 2017-03-14 |
| 8957351 | Catalytic CVD equipment, method for formation of film, process for production of solar cell, and substrate holder | Masaki Shima, Yoshinori Wakamiya, Shuji Osono, Hideyuki Ogata | 2015-02-17 |
| 6742977 | Substrate processing device, substrate conveying device, and substrate processing method | Motoichi Kanazawa, Takeshige Ishida, Tomohiko Takeda, Yukio Akita, Satoru Ichimura +4 more | 2004-06-01 |
| 6485604 | Substrate processing apparatus | Kenji Etoh | 2002-11-26 |
| 5772770 | Substrate processing apparatus | Atsuhiko Suda | 1998-06-30 |