Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6742977 | Substrate processing device, substrate conveying device, and substrate processing method | Satohiro Okayama, Takeshige Ishida, Tomohiko Takeda, Yukio Akita, Satoru Ichimura +4 more | 2004-06-01 |
| 5127987 | Continuous etching process and apparatus therefor | Sadayuki Okudaira, Hideo Komatsu, Osamu Matsumoto | 1992-07-07 |