Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9735068 | Method of manufacturing semiconductor device | Naofumi Ohashi, Masanori NAKAYAMA, Kazuyuki Toyoda, Shun MATSUI | 2017-08-15 |
| 9666494 | Method of manufacturing semiconductor device | Kazuyuki Toyoda, Toshiyuki Kikuchi | 2017-05-30 |
| 9431220 | Substrate processing apparatus and substrate processing system | Naofumi Ohashi, Masanori NAKAYAMA, Kazuyuki Toyoda, Shun MATSUI | 2016-08-30 |
| 9355866 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Satoshi Shimamoto, Naofumi Ohashi | 2016-05-31 |
| 8641829 | Substrate processing system | Tomoki Horita, Kazuhiro Hirahara, Hironobu Miya, Hirohisa Yamazaki | 2014-02-04 |
| 8506714 | Substrate processing system | Tomoki Horita, Kazuhiro Hirahara, Hironobu Miya, Hirohisa Yamazaki | 2013-08-13 |
| 8240271 | Substrate processing apparatus | — | 2012-08-14 |
| 7981815 | Semiconductor device producing method and substrate processing apparatus | Hironobu Miya, Kazuhiro Hirahara, Yoshitaka Hamada | 2011-07-19 |
| 6053980 | Substrate processing apparatus | Kazuyuki Toyoda, Issei Makiguchi, Makoto Ozawa | 2000-04-25 |
| 5772770 | Substrate processing apparatus | Satohiro Okayama | 1998-06-30 |
| 5480702 | Article having indicia-receiving layer | Taiji Matsumoto, Kenji Sumiya, Yoshinori Yamamoto | 1996-01-02 |