Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8641829 | Substrate processing system | Tomoki Horita, Hironobu Miya, Atsuhiko Suda, Hirohisa Yamazaki | 2014-02-04 |
| 8604126 | Silicone resin composition and optical material | Yoshitaka Hamada | 2013-12-10 |
| 8506714 | Substrate processing system | Tomoki Horita, Hironobu Miya, Atsuhiko Suda, Hirohisa Yamazaki | 2013-08-13 |
| 8461367 | Preparation process of trisilylamine | Yoshitaka Hamada | 2013-06-11 |
| 7981815 | Semiconductor device producing method and substrate processing apparatus | Hironobu Miya, Yoshitaka Hamada, Atsuhiko Suda | 2011-07-19 |
| 6987565 | Organometallic compound vaporizing/feeding system | Takanobu Tsudera, Daisuke Iwai | 2006-01-17 |
| 6737214 | Chemical amplification resist compositions | Takanobu Takeda, Osamu Watanabe, Katsuya Takemura, Wataru Kusaki, Akihiro Seki | 2004-05-18 |
| 6641975 | Resist composition and patterning process | Takanobu Takeda, Osamu Watanabe, Kazunori Maeda, Wataru Kusaki, Shigehiro Nagura | 2003-11-04 |
| 6322924 | Preparation of crosslinked solid polymer electrolyte | Toru Nakanishi | 2001-11-27 |
| 6096234 | Cross-linked polymer solid electrolyte, method of manufacturing cross-linked solid polymer electrolyte, composite solid electrolyte, and thin solid cell employing composite solid electrolyte | Toru Nakanishi, Toshinobu Ishihara, Yoshinobu Isono, Atsushi Takano | 2000-08-01 |
| 6025437 | Block-graft copolymer, self-crosslinked polymer solid electrolyte and composite solid electrolyte manufactured through use of the block-graft copolymer, and solid cell employing the composite solid electrolyte | Toru Nakanishi, Yoshinobu Isono, Atsushi Takano | 2000-02-15 |
| 5951820 | Method of purifying an organometallic compound | Hiromi Ohsaki, Toshinobu Ishihara, Isao Kaneko | 1999-09-14 |
| 5377616 | Method for vaporizing and supplying organometal compounds | Hiroshi Mihira, Tetsuo Shimizu, Toshinobu Ishihara, Seiki Takaya | 1995-01-03 |
| 5160542 | Apparatus for vaporizing and supplying organometal compounds | Hiroshi Mihira, Tetsuo Shimizu, Toshinobu Ishihara, Seiki Takaya | 1992-11-03 |