Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8641829 | Substrate processing system | Tomoki Horita, Kazuhiro Hirahara, Atsuhiko Suda, Hirohisa Yamazaki | 2014-02-04 |
| 8506714 | Substrate processing system | Tomoki Horita, Kazuhiro Hirahara, Atsuhiko Suda, Hirohisa Yamazaki | 2013-08-13 |
| 8481434 | Method of manufacturing a semiconductor device and processing apparatus | Eisuke Nishitani, Yuji Takebayashi, Masanori Sakai, Hirohisa Yamazaki, Toshinori Shibata +1 more | 2013-07-09 |
| 8227346 | Method of producing semiconductor device | Kazuyuki Toyoda, Norikazu Mizuno, Taketoshi Sato, Masanori Sakai, Masayuki Asai +2 more | 2012-07-24 |
| 8105957 | Method of producing semiconductor device | Kazuyuki Toyoda, Taketoshi Sato, Masayuki Asai, Norikazu Mizuno, Masanori Sakai +2 more | 2012-01-31 |
| 8058184 | Semiconductor device producing method | Masayuki Asai, Norikazu Mizuno | 2011-11-15 |
| 8039404 | Production method for semiconductor device | Kazuyuki Toyoda, Norikazu Mizuno, Taketoshi Sato, Masanori Sakai, Masayuki Asai +2 more | 2011-10-18 |
| 7981815 | Semiconductor device producing method and substrate processing apparatus | Kazuhiro Hirahara, Yoshitaka Hamada, Atsuhiko Suda | 2011-07-19 |
| 7892983 | Substrate processing apparatus and producing method of semiconductor device | Taketoshi Sato, Norikazu Mizuno, Masanori Sakai, Takaaki Noda | 2011-02-22 |
| 7779785 | Production method for semiconductor device and substrate processing apparatus | Kazuyuki Toyoda, Norikazu Mizuno, Taketoshi Sato, Masanori Sakai, Masayuki Asai +2 more | 2010-08-24 |
| 7767594 | Semiconductor device producing method | Masayuki Asai, Norikazu Mizuno | 2010-08-03 |
| 7662727 | Method for manufacturing semiconductor device background | Norikazu Mizuno, Masanori Sakai, Shinya Sasaki, Hirohisa Yamazaki | 2010-02-16 |