Issued Patents All Time
Showing 1–25 of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148611 | Substrate processing method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Tomoki IMAMURA, Kazuyuki Okuda, Masato Terasaki | 2024-11-19 |
| 12139787 | Apparatus and method for cleaning reaction vessel for processing substrate | Shinya Ebata, Koei KURIBAYASHI | 2024-11-12 |
| 12040179 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kotaro Konno, Shingo NOHARA, Takeo Hanashima | 2024-07-16 |
| 11972934 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Tomoki IMAMURA, Kazuyuki Okuda, Masato Terasaki | 2024-04-30 |
| 11848201 | Method of manufacturing semiconductor device, recording medium, and substrate processing method | Tsukasa Kamakura, Yoshiro Hirose | 2023-12-19 |
| 11401849 | Internal combustion engine exhaust purification device | Osamu Igarashi, Naofumi Ochi, Shirou Ochiai, Hiromichi Yamada | 2022-08-02 |
| 11251038 | Method of manufacturing semiconductor device, recording medium, and substrate processing method | Tsukasa Kamakura, Yoshiro Hirose | 2022-02-15 |
| 11251039 | Method of manufacturing semiconductor device, recording medium, and substrate processing method | Tsukasa Kamakura, Yoshiro Hirose | 2022-02-15 |
| 10062562 | Method of manufacturing semiconductor device, substrate processing apparatus and recording medium | Kotaro Konno | 2018-08-28 |
| 10032626 | Method of manufacturing semiconductor device by forming a film on a substrate, substrate processing apparatus, and recording medium | Shingo NOHARA, Kosuke Takagi, Takeo Hanashima, Mamoru Sueyoshi, Kotaro Konno +1 more | 2018-07-24 |
| 9865451 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Shingo NOHARA, Yoshiro Hirose | 2018-01-09 |
| 9831082 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium | Satoshi Shimamoto, Takeo Hanashima, Yoshiro Hirose, Hiroshi Ashihara, Tsukasa Kamakura +1 more | 2017-11-28 |
| 9793107 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Satoshi Shimamoto, Shingo NOHARA, Yoshiro Hirose, Kiyohiko Maeda | 2017-10-17 |
| 9698007 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Satoshi Shimamoto, Shingo NOHARA, Yoshiro Hirose, Kiyohiko Maeda | 2017-07-04 |
| 9673043 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and recording medium | Shingo NOHARA, Satoshi Shimamoto, Hiroshi Ashihara, Takeo Hanashima, Yoshiro Hirose +1 more | 2017-06-06 |
| 9653326 | Method of cleaning, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masatoshi Takada | 2017-05-16 |
| 9530641 | Method for manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takeo Hanashima, Jie Wang | 2016-12-27 |
| 9514935 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and program | Takeo Hanashima | 2016-12-06 |
| 9472391 | Semiconductor device manufacturing method | Satoshi Shimamoto, Yoshiro Hirose, Atsushi Sano, Tsukasa Kamakura | 2016-10-18 |
| 9349586 | Method of manufacturing semiconductor device, substrate processing apparatus, substrate processing system and non-transitory computer-readable recording medium | Satoshi Shimamoto, Takeo Hanashima, Yoshiro Hirose, Hiroshi Ashihara, Tsukasa Kamakura +1 more | 2016-05-24 |
| 9263251 | Method of manufacturing semiconductor device, semiconductor device and substrate processing apparatus | Norikazu Mizuno, Tomohide Kato | 2016-02-16 |
| D748578 | Adapter plate | Kosuke Takagi | 2016-02-02 |
| D748056 | Adapter plate | Kosuke Takagi | 2016-01-26 |
| 9153430 | Substrate processing apparatus, method of manufacturing semiconductor device and program | Jie Wang | 2015-10-06 |
| 9123531 | Method of manufacturing semiconductor device, semiconductor device and substrate processing apparatus | Norikazu Mizuno, Tomohide Kato | 2015-09-01 |