Issued Patents All Time
Showing 1–25 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840094 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masato Terasaki, Yasuhiro Megawa, Takahiro MIYAKURA, Akito Hirano, Takashi Nakagawa | 2020-11-17 |
| 10497561 | Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium | Yoshinobu Nakamura, Yoshiro Hirose, Ryota Horiike, Yoshitomo HASHIMOTO | 2019-12-03 |
| 10229829 | Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium | Yoshinobu Nakamura, Yoshiro Hirose, Ryota Horiike, Yoshitomo HASHIMOTO | 2019-03-12 |
| 10163625 | Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium | Yoshinobu Nakamura, Yoshiro Hirose, Ryota Horiike, Yoshitomo HASHIMOTO | 2018-12-25 |
| 9793107 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takaaki Noda, Satoshi Shimamoto, Shingo NOHARA, Yoshiro Hirose | 2017-10-17 |
| 9698007 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takaaki Noda, Satoshi Shimamoto, Shingo NOHARA, Yoshiro Hirose | 2017-07-04 |
| 9666430 | Method of manufacturing semiconductor device and substrate processing apparatus | Yasunobu Koshi, Keigo NISHIDA | 2017-05-30 |
| 9349587 | Method of manufacturing semiconductor device and method of processing substrate and substrate processing apparatus | Yoshiro Hirose, Atsushi Sano, Kazuyuki Okuda | 2016-05-24 |
| 9177786 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and recording medium | Atsushi Sano, Yoshiro Hirose, Kazuyuki Okuda, Ryuji Yamamoto | 2015-11-03 |
| D740769 | Boat for substrate processing apparatus | Kosuke Takagi, Yuji Urano, Naoki Matsumoto, Yasuaki Komae | 2015-10-13 |
| D739831 | Boat for substrate processing apparatus | Kosuke Takagi, Yuji Urano, Naoki Matsumoto, Yasuaki Komae | 2015-09-29 |
| 8679989 | Method of manufacturing semiconductor device including removal of deposits from process chamber and supply portion | Sadao Nakashima, Takahiro Maeda, Kenji Kameda, Yushin Takasawa | 2014-03-25 |
| 8575042 | Method of manufacturing semiconductor device and method of processing substrate and substrate processing apparatus | Yosuke Ota, Yoshiro Hirose, Atsushi Sano, Osamu Kasahara, Kazuyuki Okuda | 2013-11-05 |
| 8497192 | Method of manufacturing a semiconductor device and substrate processing apparatus | Kiyohisa ISHIBASHI, Atsushi Moriya, Takaaki Noda | 2013-07-30 |
| 8367530 | Substrate processing apparatus and manufacturing method of semiconductor device | Takeo Hanashima, Masanao Osanai | 2013-02-05 |
| 8304328 | Manufacturing method of semiconductor device and substrate processing apparatus | Takahiro Maeda, Takashi Ozaki, Akihito Yoshino, Yasunobu Koshi, Yuji Urano | 2012-11-06 |
| 8293646 | Semiconductor device manufacturing method and substrate processing apparatus | Takashi Ozaki, Osamu Kasahara, Takaaki Noda, Atsushi Moriya, Minoru Sakamoto | 2012-10-23 |
| 8282737 | Substrate processing apparatus and method for manufacturing a semiconductor device | Takashi Ozaki, Tomoshi Taniyama, Hiroshi Unami, Shinya Morita, Yoshikazu Takashima +1 more | 2012-10-09 |
| 8084369 | Producing method of semiconductor device and substrate processing apparatus | Takashi Ozaki, Kazuhiro Yuasa | 2011-12-27 |
| 8057599 | Substrate processing apparatus and method for manufacturing a semiconductor device | Takashi Ozaki, Tomoshi Taniyama, Hiroshi Unami, Shinya Morita, Yoshikazu Takashima +1 more | 2011-11-15 |
| 8043431 | Substrate processing apparatus and method for manufacturing a semiconductor device | Takashi Ozaki, Tomoshi Taniyama, Hiroshi Unami, Shinya Morita, Yoshikazu Takashima +1 more | 2011-10-25 |
| 7883581 | Substrate processing apparatus and method of manufacturing semiconductor device | Naoharu Nakaiso, Masayuki Yamada | 2011-02-08 |
| 7879400 | Substrate processing apparatus, method of manufacturing a semiconductor device, and method of forming a thin film on metal surface | Takahiro Maeda, Takashi Ozaki | 2011-02-01 |
| 7871938 | Producing method of semiconductor device and substrate processing apparatus | Takashi Ozaki, Kazuhiro Yuasa | 2011-01-18 |
| 7858534 | Semiconductor device manufacturing method and substrate processing apparatus | — | 2010-12-28 |