Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381079 | Method of manufacturing semiconductor device, substrate processing apparatus, recording medium and method of processing substrate | Hideki Horita | 2025-08-05 |
| 12359314 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Shin SONE, Hiroki HATTA | 2025-07-15 |
| 11587788 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Hideki Horita | 2023-02-21 |
| 10497561 | Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium | Yoshinobu Nakamura, Kiyohiko Maeda, Yoshiro Hirose, Yoshitomo HASHIMOTO | 2019-12-03 |
| 10229829 | Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium | Yoshinobu Nakamura, Kiyohiko Maeda, Yoshiro Hirose, Yoshitomo HASHIMOTO | 2019-03-12 |
| 10199219 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Satoshi Shimamoto, Yoshiro Hirose, Hajime Karasawa, Naoharu Nakaiso, Yoshitomo HASHIMOTO | 2019-02-05 |
| 10176988 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kenji Kameda | 2019-01-08 |
| 10163625 | Method for manufacturing semiconductor device, substrate-processing apparatus, and recording medium | Yoshinobu Nakamura, Kiyohiko Maeda, Yoshiro Hirose, Yoshitomo HASHIMOTO | 2018-12-25 |
| 10096463 | Method of manufacturing semiconductor device, substrate processing apparatus comprising exhaust port and multiple nozzles, and recording medium | Yoshitomo HASHIMOTO, Tatsuru Matsuoka, Masaya NAGATO, Shintaro Kogura | 2018-10-09 |