Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381079 | Method of manufacturing semiconductor device, substrate processing apparatus, recording medium and method of processing substrate | Ryota Horiike | 2025-08-05 |
| 12341000 | Substrate processing apparatus and recording medium | Masanori OKUNO, Kazuyoshi Yamamoto, Kazuhide Asai, Toshihiko Yonejima | 2025-06-24 |
| 11587788 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Ryota Horiike | 2023-02-21 |
| 11236743 | Substrate processing apparatus and recording medium | Masanori OKUNO, Kazuyoshi Yamamoto, Kazuhide Asai, Toshihiko Yonejima | 2022-02-01 |
| 11066744 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Tatsuya Yotsutani, Takashi Ozaki | 2021-07-20 |
| 11041240 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Kosuke Takagi, Risa YAMAKOSHI, Atsushi Hirano | 2021-06-22 |
| 10714336 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Masato Terasaki | 2020-07-14 |
| 10513775 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Risa YAMAKOSHI, Masato Terasaki, Takashi Ozaki, Naonori Akae | 2019-12-24 |
| 10513774 | Substrate processing apparatus and guide portion | Masato Terasaki, Naonori Akae | 2019-12-24 |
| 9934960 | Method of manufacturing semiconductor device | Risa YAMAKOSHI, Masato Terasaki | 2018-04-03 |
| 9905413 | Method of manufacturing semiconductor device | Risa YAMAKOSHI, Takashi Ozaki, Masato Terasaki, Naonori Akae | 2018-02-27 |
| 9552980 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takashi Ozaki | 2017-01-24 |
| 9401272 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Masato Terasaki, Naonori Akae | 2016-07-26 |
| 8227346 | Method of producing semiconductor device | Hironobu Miya, Kazuyuki Toyoda, Norikazu Mizuno, Taketoshi Sato, Masanori Sakai +2 more | 2012-07-24 |
| 8105957 | Method of producing semiconductor device | Hironobu Miya, Kazuyuki Toyoda, Taketoshi Sato, Masayuki Asai, Norikazu Mizuno +2 more | 2012-01-31 |
| 8039404 | Production method for semiconductor device | Hironobu Miya, Kazuyuki Toyoda, Norikazu Mizuno, Taketoshi Sato, Masanori Sakai +2 more | 2011-10-18 |
| 7779785 | Production method for semiconductor device and substrate processing apparatus | Hironobu Miya, Kazuyuki Toyoda, Norikazu Mizuno, Taketoshi Sato, Masanori Sakai +2 more | 2010-08-24 |