Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11450524 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Kosuke Takagi, Takanori Ueno | 2022-09-20 |
| 11041240 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Kosuke Takagi, Hideki Horita, Atsushi Hirano | 2021-06-22 |
| 10607833 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Takashi Ozaki, Masato Terasaki, Satoshi Shimamoto, Jiro Yugami +1 more | 2020-03-31 |
| 10513775 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masato Terasaki, Takashi Ozaki, Naonori Akae, Hideki Horita | 2019-12-24 |
| 10081868 | Gas supply nozzle, substrate processing apparatus, and non-transitory computer-readable recording medium | Kosuke Takagi, Ryota Sasajima, Shintaro Kogura, Naonori Akae, Toshiki Fujino +2 more | 2018-09-25 |
| 9934960 | Method of manufacturing semiconductor device | Hideki Horita, Masato Terasaki | 2018-04-03 |
| 9905413 | Method of manufacturing semiconductor device | Takashi Ozaki, Masato Terasaki, Naonori Akae, Hideki Horita | 2018-02-27 |