Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148611 | Substrate processing method, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Takaaki Noda, Tomoki IMAMURA, Kazuyuki Okuda | 2024-11-19 |
| 11972934 | Method of manufacturing semiconductor device, substrate processing method, substrate processing apparatus, and recording medium | Tomoki IMAMURA, Takaaki Noda, Kazuyuki Okuda | 2024-04-30 |
| 11462401 | Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium | Kosuke Takagi, Naonori Akae, Mikio Ohno | 2022-10-04 |
| 10840094 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kiyohiko Maeda, Yasuhiro Megawa, Takahiro MIYAKURA, Akito Hirano, Takashi Nakagawa | 2020-11-17 |
| 10714336 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Hideki Horita | 2020-07-14 |
| 10607833 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Katsuyoshi Harada, Takashi Ozaki, Risa YAMAKOSHI, Satoshi Shimamoto, Jiro Yugami +1 more | 2020-03-31 |
| 10513775 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Risa YAMAKOSHI, Takashi Ozaki, Naonori Akae, Hideki Horita | 2019-12-24 |
| 10513774 | Substrate processing apparatus and guide portion | Naonori Akae, Hideki Horita | 2019-12-24 |
| 10081868 | Gas supply nozzle, substrate processing apparatus, and non-transitory computer-readable recording medium | Kosuke Takagi, Ryota Sasajima, Shintaro Kogura, Naonori Akae, Risa YAMAKOSHI +2 more | 2018-09-25 |
| 9934960 | Method of manufacturing semiconductor device | Hideki Horita, Risa YAMAKOSHI | 2018-04-03 |
| 9905413 | Method of manufacturing semiconductor device | Risa YAMAKOSHI, Takashi Ozaki, Naonori Akae, Hideki Horita | 2018-02-27 |
| D773609 | Return nozzle | Shinya Morita, Masahiro Miyake, Naoki Matsumoto, Naonori Akae | 2016-12-06 |
| D771772 | Return nozzle | Shinya Morita, Masahiro Miyake, Naoki Matsumoto, Naonori Akae | 2016-11-15 |
| D771543 | Return nozzle | Shinya Morita, Masahiro Miyake, Naoki Matsumoto, Naonori Akae | 2016-11-15 |
| 9401272 | Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Naonori Akae, Hideki Horita | 2016-07-26 |
| 9190264 | Method of manufacturing semiconductor device, method of processing substrate and non-transitory computer readable recording medium | Kazuhiro Yuasa, Naonori Akae | 2015-11-17 |
| D739832 | Reaction tube | Keishin Yamazaki, Masahiro Miyake, Shinya Morita, Kosuke Takagi, Yasuaki Komae +3 more | 2015-09-29 |
| 9006116 | Method of manufacturing semiconductor device, substrate processing method and substrate processing apparatus | — | 2015-04-14 |
| D725055 | Reaction tube | Keishin Yamazaki, Masahiro Miyake, Kosuke Takagi, Yasuaki Komae, Shinya Morita +1 more | 2015-03-24 |
| D720707 | Reaction tube | Keishin Yamazaki, Masahiro Miyake, Kosuke Takagi, Yasuaki Komae, Shinya Morita +1 more | 2015-01-06 |
| D719114 | Reaction tube | Keishin Yamazaki, Masahiro Miyake, Kosuke Takagi, Yasuaki Komae, Shinya Morita +1 more | 2014-12-09 |
| D711843 | Reaction tube | Keishin Yamazaki, Masahiro Miyake, Kosuke Takagi, Yasuaki Komae, Shinya Morita +1 more | 2014-08-26 |
| 7795157 | Substrate treatment device and manufacturing method of semiconductor device | Shinya Morita, Manabu Izumi | 2010-09-14 |
| 6194037 | Method of plasma processing a substrate placed on a substrate table | Kazunori Tsutsuguchi | 2001-02-27 |