Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840094 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kiyohiko Maeda, Masato Terasaki, Takahiro MIYAKURA, Akito Hirano, Takashi Nakagawa | 2020-11-17 |
| 8901013 | Substrate processing apparatus, method of processing substrate and method of manufacturing semiconductor device | Kazuhiro Yuasa, Masanao Fukuda, Takafumi Sasaki, Masayoshi Minami | 2014-12-02 |
| 8448599 | Device for processing a substrate, method of processing a substrate and method of manufacturing semiconductor device | Kazuhiro Yuasa, Kazuhiro Kimura | 2013-05-28 |
| 8003411 | Device for processing a substrate, method of processing a substrate and method of manufacturing semiconductor device | Kazuhiro Yuasa, Kazuhiro Kimura | 2011-08-23 |
| 7713883 | Manufacturing method of a semiconductor device, and substrate processing apparatus | Kazuhiro Yuasa | 2010-05-11 |
| 7682987 | Device for processing substrate and method of manufacturing semiconductor device | Kazuhiro Yuasa, Kazuhiro Kimura | 2010-03-23 |