Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840094 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kiyohiko Maeda, Masato Terasaki, Yasuhiro Megawa, Takahiro MIYAKURA, Takashi Nakagawa | 2020-11-17 |
| 10192735 | Substrate processing method and substrate processing apparatus | Tatsushi UEDA, Tadashi Terasaki, Unryu Ogawa | 2019-01-29 |
| 10049870 | Method of manufacturing semiconductor device including silicon nitride layer for inhibiting excessive oxidation of polysilicon film | — | 2018-08-14 |
| 9754780 | Substrate processing method and substrate processing apparatus | Tatsushi UEDA, Tadashi Terasaki, Unryu Ogawa | 2017-09-05 |
| 9236242 | Substrate processing method and substrate processing apparatus | Tatsushi UEDA, Tadashi Terasaki, Unryu Ogawa | 2016-01-12 |
| 8334215 | Substrate processing method and substrate processing apparatus | Tatsushi UEDA, Tadashi Terasaki, Unryu Ogawa | 2012-12-18 |
| 8178445 | Substrate processing apparatus and manufacturing method of semiconductor device using plasma generation | Tadashi Horie, Tadashi Terasaki | 2012-05-15 |
| 8133820 | Substrate processing method and substrate processing apparatus | — | 2012-03-13 |
| 8066894 | Substrate processing method and substrate processing apparatus | Tatsushi UEDA, Tadashi Terasaki, Unryu Ogawa | 2011-11-29 |
| 7795156 | Producing method of semiconductor device | Tadashi Terasaki, Masanori NAKAYAMA, Unryu Ogawa | 2010-09-14 |