Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12154826 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masanori NAKAYAMA, Katsunori FUNAKI, Yasutoshi TSUBOTA, Yuichiro TAKESHIMA, Hiroto IGAWA +1 more | 2024-11-26 |
| 12040161 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yasutoshi TSUBOTA, Masanori NAKAYAMA, Katsunori FUNAKI, Eiko TAKAMI, Yuichiro TAKESHIMA +3 more | 2024-07-16 |
| 11908682 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Hiroto IGAWA, Masanori NAKAYAMA, Katsunori FUNAKI, Yasutoshi TSUBOTA, Eiko TAKAMI +2 more | 2024-02-20 |
| 11664275 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masanori NAKAYAMA, Katsunori FUNAKI, Yasutoshi TSUBOTA, Yuichiro TAKESHIMA, Hiroto IGAWA +1 more | 2023-05-30 |
| 11081362 | Method of manufacturing semiconductor device, and recording medium | Yuki YAMAKADO, Masanori NAKAYAMA, Katsunori FUNAKI, Yasutoshi TSUBOTA, Eiko TAKAMI +2 more | 2021-08-03 |
| 10546761 | Substrate processing apparatus | — | 2020-01-28 |
| 10192735 | Substrate processing method and substrate processing apparatus | Tadashi Terasaki, Unryu Ogawa, Akito Hirano | 2019-01-29 |
| 9786493 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Junichi Tanabe, Katsuhiko Yamamoto, Yuki TAIRA, Naofumi Ohashi, Hideharu Itatani | 2017-10-10 |
| 9754780 | Substrate processing method and substrate processing apparatus | Tadashi Terasaki, Unryu Ogawa, Akito Hirano | 2017-09-05 |
| 9748132 | Substrate processing apparatus, method for manufacturing semiconductor device, method for processing substrates | Koichiro Harada, Noriaki MICHITA, Takayuki Sato | 2017-08-29 |
| 9257271 | Semiconductor device manufacturing method, substrate processing apparatus, and non-transitory recording medium | — | 2016-02-09 |
| 9236242 | Substrate processing method and substrate processing apparatus | Tadashi Terasaki, Unryu Ogawa, Akito Hirano | 2016-01-12 |
| 8334215 | Substrate processing method and substrate processing apparatus | Tadashi Terasaki, Unryu Ogawa, Akito Hirano | 2012-12-18 |
| 8066894 | Substrate processing method and substrate processing apparatus | Tadashi Terasaki, Unryu Ogawa, Akito Hirano | 2011-11-29 |
| 7651954 | Manufacturing method of semiconductor device and semiconductor device manufacturing apparatus | — | 2010-01-26 |