Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12154826 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masanori NAKAYAMA, Katsunori FUNAKI, Tatsushi UEDA, Yasutoshi TSUBOTA, Hiroto IGAWA +1 more | 2024-11-26 |
| 12040161 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yasutoshi TSUBOTA, Masanori NAKAYAMA, Katsunori FUNAKI, Tatsushi UEDA, Eiko TAKAMI +3 more | 2024-07-16 |
| 11908682 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Hiroto IGAWA, Masanori NAKAYAMA, Katsunori FUNAKI, Tatsushi UEDA, Yasutoshi TSUBOTA +2 more | 2024-02-20 |
| 11664275 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masanori NAKAYAMA, Katsunori FUNAKI, Tatsushi UEDA, Yasutoshi TSUBOTA, Hiroto IGAWA +1 more | 2023-05-30 |
| 11189483 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Masanori NAKAYAMA, Katsunori FUNAKI, Yasutoshi TSUBOTA, Hiroto IGAWA | 2021-11-30 |
| 11152476 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Masanori NAKAYAMA, Hiroto IGAWA, Katsunori FUNAKI | 2021-10-19 |
| 11081362 | Method of manufacturing semiconductor device, and recording medium | Yuki YAMAKADO, Masanori NAKAYAMA, Katsunori FUNAKI, Tatsushi UEDA, Yasutoshi TSUBOTA +2 more | 2021-08-03 |
| 10796900 | Method of manufacturing semiconductor device | Masanori NAKAYAMA, Katsunori FUNAKI, Yasutoshi TSUBOTA, Hiroto IGAWA | 2020-10-06 |
| 9023429 | Method of manufacturing semiconductor device and substrate processing apparatus | Osamu Kasahara, Kazuyuki Toyoda, Junichi Tanabe, Katsuhiko Yamamoto, Hisashi Nomura | 2015-05-05 |