Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9023429 | Method of manufacturing semiconductor device and substrate processing apparatus | Yuichiro TAKESHIMA, Osamu Kasahara, Kazuyuki Toyoda, Junichi Tanabe, Katsuhiko Yamamoto | 2015-05-05 |
| 7943115 | Porous 4 group metal oxide and method for preparation thereof | Shinichi Inoue, Hidehiko Kudou, Akihiro Mutou, Tateo Ono, Toshiji Makabe +1 more | 2011-05-17 |
| 7691781 | Layered porous titanium oxide, process for producing the same, and catalyst comprising the same | Shinichi Inoue, Akihiro Mutou, Yukitaka Wada, Hidehiko Kudou, Tateo Ono | 2010-04-06 |
| 6821871 | Method for manufacturing semiconductor device, substrate treatment method, and semiconductor manufacturing apparatus | Yushin Takasawa, Hajime Karasawa, Yoshinori Imai, Tadanori Yoshida, Kenichi Yamaguchi | 2004-11-23 |
| 6787481 | Method for manufacturing semiconductor device | Masayuki Asai, Sadayoshi Horii | 2004-09-07 |
| 5960159 | Heat treatment of semiconductor wafers where upper heater directly heats upper wafer in its entirety and lower heater directly heats lower wafer in its entirety | Fumihide Ikeda, Junichi Machida, Masayuki Tomita, Yasuhiro Inokuchi, Kazuhiro Shimeno +1 more | 1999-09-28 |