Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12217959 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kimihiko NAKATANI, Tsukasa Kamakura, Kazuhiro Harada | 2025-02-04 |
| 10720324 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kimihiko NAKATANI, Hiroshi Ashihara, Kazuhiro Harada | 2020-07-21 |
| 10199219 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Satoshi Shimamoto, Yoshiro Hirose, Ryota Horiike, Naoharu Nakaiso, Yoshitomo HASHIMOTO | 2019-02-05 |
| 10032630 | Method of manufacturing semiconductor device | Katsuhiko Yamamoto, Kazuyuki Toyoda | 2018-07-24 |
| 10026607 | Substrate processing apparatus for forming film including at least two different elements | Yushin Takasawa, Yoshiro Hirose | 2018-07-17 |
| 9487861 | Substrate processing apparatus capable of forming films including at least two different elements | Yushin Takasawa, Yoshiro Hirose | 2016-11-08 |
| 9478417 | Method of manufacturing semiconductor device for forming film including at least two different elements | Yushin Takasawa, Yoshiro Hirose | 2016-10-25 |
| 9443719 | Method of manufacturing semiconductor device for forming film including at least two different elements | Yushin Takasawa, Yoshiro Hirose | 2016-09-13 |
| 9443720 | Method of manufacturing semiconductor device for forming film including at least two different elements | Yushin Takasawa, Yoshiro Hirose | 2016-09-13 |
| 9384968 | Method of manufacturing a semiconductor device by forming a film on a substrate | Yushin Takasawa, Yoshiro Hirose | 2016-07-05 |
| 9384969 | Method of manufacturing semiconductor device by forming a film on a substrate | Yushin Takasawa, Yoshiro Hirose | 2016-07-05 |
| 9384970 | Method of manufacturing semiconductor device by forming a film on a substrate | Yushin Takasawa, Yoshiro Hirose | 2016-07-05 |
| 9384971 | Method of manufacturing semiconductor device by forming a film on a substrate | Yushin Takasawa, Yoshiro Hirose | 2016-07-05 |
| 9384972 | Method of manufacturing semiconductor device by forming a film on a substrate | Yushin Takasawa, Yoshiro Hirose | 2016-07-05 |
| 9385013 | Method and apparatus of manufacturing a semiconductor device by forming a film on a substrate | Yushin Takasawa, Yoshiro Hirose | 2016-07-05 |
| 9384966 | Method of manufacturing a semiconductor device by forming a film on a substrate | Yushin Takasawa, Yoshiro Hirose | 2016-07-05 |
| 9384967 | Method of manufacturing a semiconductor device by forming a film on a substrate | Yushin Takasawa, Yoshiro Hirose | 2016-07-05 |
| 9330904 | Method of manufacturing semiconductor device and substrate processing apparatus | Yushin Takasawa, Yoshiro Hirose | 2016-05-03 |
| 9318316 | Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus for forming thin film containing at least two different elements | Yushin Takasawa, Yoshiro Hirose | 2016-04-19 |
| 9312123 | Method of manufacturing semiconductor device and substrate processing apparatus | Yushin Takasawa, Yoshiro Hirose | 2016-04-12 |
| 8409988 | Method of manufacturing semiconductor device and substrate processing apparatus | Yushin Takasawa, Yoshiro Hirose | 2013-04-02 |
| 6943089 | Semiconductor device manufacturing method and semiconductor manufacturing apparatus | Yushin Takasawa | 2005-09-13 |
| 6821871 | Method for manufacturing semiconductor device, substrate treatment method, and semiconductor manufacturing apparatus | Hisashi Nomura, Yushin Takasawa, Yoshinori Imai, Tadanori Yoshida, Kenichi Yamaguchi | 2004-11-23 |
| 5473774 | Method for conflict detection in parallel processing system | Jimmie D. Childers | 1995-12-05 |