Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8476138 | Semiconductor memory device and a method of manufacturing the same, a method of manufacturing a vertical MISFET and a vertical MISFET, and a method of manufacturing a semiconductor device and a semiconductor device | Hiraku Chakihara, Kousuke Okuyama, Masahiro Moniwa, Makoto Mizuno, Keiji Okamoto +3 more | 2013-07-02 |
| 7972920 | Semiconductor memory device and a method of manufacturing the same, a method of manufacturing a vertical MISFET and a vertical MISFET, and a method of manufacturing a semiconductor device and a semiconductor device | Hiraku Chakihara, Kousuke Okuyama, Masahiro Moniwa, Makoto Mizuno, Keiji Okamoto +3 more | 2011-07-05 |
| 7701020 | Semiconductor memory device and a method of manufacturing the same, a method of manufacturing a vertical MISFET and a vertical MISFET, and a method of manufacturing a semiconductor device and a semiconductor device | Hiraku Chakihara, Kousuke Okuyama, Masahiro Moniwa, Makoto Mizuno, Keiji Okamoto +3 more | 2010-04-20 |
| 7495289 | Semiconductor memory device and a method of manufacturing the same, a method of manufacturing a vertical MISFET and a vertical MISFET, and a method of manufacturing a semiconductor device and a semiconductor device | Hiraku Chakihara, Kousuke Okuyama, Masahiro Moniwa, Makoto Mizuno, Keiji Okamoto +3 more | 2009-02-24 |
| 7190031 | Semiconductor memory device and a method of manufacturing the same, a method of manufacturing a vertical MISFET and a vertical MISFET, and a method of manufacturing a semiconductor device and a semiconductor device | Hiraku Chakihara, Kousuke Okuyama, Masahiro Moniwa, Makoto Mizuno, Keiji Okamoto +3 more | 2007-03-13 |
| 7161215 | Semiconductor memory device and method of manufacturing the same, a method of manufacturing a vertical MISFET and a vertical MISFET, and a method of manufacturing a semiconductor device and a semiconductor device | Hiraku Chakihara, Kousuke Okuyama, Masahiro Moniwa, Makoto Mizuno, Keiji Okamoto +3 more | 2007-01-09 |
| 6905928 | MOS transistor apparatus and method of manufacturing same | Naoki Kanda, Arito OGAWA, Eisuke Nishitani, Miwako Nakahara, Kiyoshi Ogata | 2005-06-14 |
| 6870224 | MOS transistor apparatus and method of manufacturing same | Naoki Kanda, Arito OGAWA, Eisuke Nishitani, Miwako Nakahara, Kiyoshi Ogata | 2005-03-22 |
| 6821871 | Method for manufacturing semiconductor device, substrate treatment method, and semiconductor manufacturing apparatus | Hisashi Nomura, Yushin Takasawa, Hajime Karasawa, Yoshinori Imai, Kenichi Yamaguchi | 2004-11-23 |
| 6770528 | Method of forming a data-storing capacitive element made in an insulating film on a semiconductor substrate | Ryouichi Furukawa, Kazuyuki Suko, Masayuki Hiranuma, Koichi Saitoh, Hirohiko Yamamoto +2 more | 2004-08-03 |
| 6764916 | Manufacturing method for semiconductor device | Ryoichi Furukawa, Masayuki Tsuneda, Yasuhiro Inokuchi, Satoru Tagami | 2004-07-20 |
| 6717202 | HSG semiconductor capacitor with migration inhibition layer | Yasuhiro Sugawara, Ryouichi Furukawa, Toshio Uemura, Akira Takamatsu, Hirohiko Yamamoto +3 more | 2004-04-06 |
| 6656838 | Process for producing semiconductor and apparatus for production | Tomoji Watanabe, Akiko Kagatsume | 2003-12-02 |
| 6632721 | Method of manufacturing semiconductor devices having capacitors with electrode including hemispherical grains | Shinpei Iijima, Satoshi Yamamoto, Jun Kuroda, Hiroshi Miki, Yoshihisa Fujisaki +1 more | 2003-10-14 |
| 6524927 | Semiconductor device and method of fabricating the same | Yasuhiro Sugawara, Ryouichi Furukawa, Toshio Uemura, Akira Takamatsu, Hirohiko Yamamoto +3 more | 2003-02-25 |
| 6444405 | Method of forming conductive layers in the trenches or through holes made in an insulating film on a semiconductors substrate | Ryouichi Furukawa, Kazuyuki Suko, Masayuki Hiranuma, Koichi Saitoh, Hirohiko Yamamoto +2 more | 2002-09-03 |
| 6403479 | Process for producing semiconductor and apparatus for production | Tomoji Watanabe, Akiko Kagatsume | 2002-06-11 |