Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8590484 | Semiconductor device manufacturing method and substrate processing apparatus | Taketoshi Sato | 2013-11-26 |
| 8093158 | Semiconductor device manufacturing method and substrate processing apparatus | Taketoshi Sato | 2012-01-10 |
| 6825126 | Manufacturing method of semiconductor device and substrate processing apparatus | Masayuki Asai, Sadayoshi Horii, Kanako Kitayama | 2004-11-30 |
| 6764916 | Manufacturing method for semiconductor device | Ryoichi Furukawa, Tadanori Yoshida, Yasuhiro Inokuchi, Satoru Tagami | 2004-07-20 |
| 6682971 | Method of manufacturing a semiconductor | Hideharu Itatani | 2004-01-27 |
| 6576481 | Method of manufacturing semiconductor devices | Hideharu Itatani, Atsushi Sano, Tsukasa Ohoka | 2003-06-10 |
| 6548404 | Method and apparatus for manufacturing semiconductor devices | Hideharu Itatani | 2003-04-15 |
| 6204199 | Method for producing a semiconductor device | Masanori Sakai, Naoko Matsuyama, Hideharu Itatani, Michihide Nakamure | 2001-03-20 |
| 4951574 | Conveyor system using automotive cart | — | 1990-08-28 |
| 4944230 | Conveyor apparatus using automotive cart | Hajime Maeda | 1990-07-31 |