Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8459202 | Substrate processing apparatus | Tomoyuki Yamada, Mamoru Oishi | 2013-06-11 |
| 6884738 | Manufacturing method of semiconductor device and substrate processing apparatus | Masayuki Asai | 2005-04-26 |
| 6825126 | Manufacturing method of semiconductor device and substrate processing apparatus | Masayuki Asai, Sadayoshi Horii, Masayuki Tsuneda | 2004-11-30 |