Issued Patents All Time
Showing 1–25 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368043 | Substrate processing apparatus, processing method, and non-transitory computer-readable recording medium | Akinori Tanaka, Hideto Tateno | 2025-07-22 |
| 12087598 | Substrate processing apparatus | Hideto Tateno, Daisuke Hara, Masahisa Okuno, Takuya JODA, Takashi Tsukamoto +2 more | 2024-09-10 |
| 11869764 | Substrate processing apparatus, substrate processing method and non-transitory computer-readable recording medium | Akinori Tanaka, Hideto Tateno | 2024-01-09 |
| 11476112 | Substrate processing apparatus | Akinori Tanaka, Hideto Tateno | 2022-10-18 |
| 11168396 | Method of manufacturing semiconductor device and recording medium | Toru Kakuda, Masahisa Okuno, Katsuhiko Yamamoto, Takuya JODA | 2021-11-09 |
| 10985017 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Katsuhiko Yamamoto, Takuya JODA, Toru Kakuda | 2021-04-20 |
| 10604839 | Substrate processing apparatus, method of manufacturing semiconductor device, and method of processing substrate | Tetsuaki INADA, Yuichi Wada, Mitsunori Ishisaka, Mitsuhiro Hirano, Hideharu Itatani +2 more | 2020-03-31 |
| 9653301 | Semiconductor device having electrode made of high work function material, method and apparatus for manufacturing the same | Arito OGAWA, Hideharu Itatani | 2017-05-16 |
| 9472637 | Semiconductor device having electrode made of high work function material and method of manufacturing the same | Arito OGAWA, Hideharu Itatani | 2016-10-18 |
| 9437704 | Semiconductor device having electrode made of high work function material, method and apparatus for manufacturing the same | Arito OGAWA, Hideharu Itatani | 2016-09-06 |
| 8741731 | Method of manufacturing a semiconductor device | Yuji Takebayashi, Hirohisa Yamazaki, Hideharu Itatani, Arito OGAWA | 2014-06-03 |
| 8728935 | Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus | Kazuhiro Harada, Hideharu Itatani | 2014-05-20 |
| 8685866 | Method of manufacturing semiconductor device and substrate processing apparatus | Atsushi Sano, Masahito Kitamura, Yoshitake Kato | 2014-04-01 |
| 8580671 | Method of manufacturing semiconductor device and substrate processing apparatus | Yoshinori Imai, Mika Karasawa | 2013-11-12 |
| 8435905 | Manufacturing method of semiconductor device, and substrate processing apparatus | Hideharu Itatani, Kazuhiro Harada | 2013-05-07 |
| 8420552 | Method of manufacturing a semiconductor device | Yuji Takebayashi, Hirohisa Yamazaki, Hideharu Itatani, Arito OGAWA | 2013-04-16 |
| 8415237 | Method of manufacturing semiconductor device and substrate processing apparatus | Yoshinori Imai | 2013-04-09 |
| 8404603 | Method of manufacturing semiconductor device and substrate processing system | Arito OGAWA, Taketoshi Sato, Hideharu Itatani, Nobuyuki Mise, Osamu Tonomura | 2013-03-26 |
| 8193083 | Method of manufacturing semiconductor device and substrate processing apparatus | Yoshinori Imai, Mika Karasawa | 2012-06-05 |
| 8026159 | Method of manufacturing semiconductor device and substrate processing apparatus | Yoshinori Imai | 2011-09-27 |
| 7968437 | Semiconductor device manufacturing method and substrate processing apparatus | Hideharu Itatani | 2011-06-28 |
| 7723245 | Method for manufacturing semiconductor device, and substrate processing apparatus | Atsushi Sano, Hideharu Itatani, Katsuhiko Yamamoto | 2010-05-25 |
| 7648578 | Substrate processing apparatus, and method for manufacturing semiconductor device | Hideharu Itatani, Hidehiro Yanai | 2010-01-19 |
| 7579276 | Substrate processing apparatus and method of manufacturing semiconductor device | Hideharu Itatani, Hidehiro Yanai, Atsushi Sano | 2009-08-25 |
| 7531467 | Manufacturing method of semiconductor device and substrate processing apparatus | Atsushi Sano, Hideharu Itatani, Masayuki Asai | 2009-05-12 |