Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8580671 | Method of manufacturing semiconductor device and substrate processing apparatus | Sadayoshi Horii, Yoshinori Imai | 2013-11-12 |
| 8193083 | Method of manufacturing semiconductor device and substrate processing apparatus | Sadayoshi Horii, Yoshinori Imai | 2012-06-05 |