Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11118252 | Galvannealed steel sheet | Kohichi Sano, Hiroyuki Kawata, Yuji Yamaguchi, Satoshi Uchida, Riki Okamoto | 2021-09-14 |
| 9177799 | Semiconductor device manufacturing method and substrate manufacturing method of forming silicon carbide films on the substrate | Hideji SHIBATA, Takafumi Sasaki | 2015-11-03 |
| 8889533 | Method of manufacturing semiconductor device, method of manufacturing substrate and substrate processing apparatus | Takafumi Sasaki, Koei KURIBAYASHI, Sadao Nakashima | 2014-11-18 |
| 8580671 | Method of manufacturing semiconductor device and substrate processing apparatus | Sadayoshi Horii, Mika Karasawa | 2013-11-12 |
| 8450220 | Substrate processing apparatus , method of manufacturing semiconductor device, and method of manufacturing substrate | Takafumi Sasaki, Sadao Nakashima, Koei KURIBAYASHI | 2013-05-28 |
| 8415237 | Method of manufacturing semiconductor device and substrate processing apparatus | Sadayoshi Horii | 2013-04-09 |
| 8409352 | Method of manufacturing semiconductor device, method of manufacturing substrate and substrate processing apparatus | Koei KURIBAYASHI, Sadao Nakashima, Takafumi Sasaki | 2013-04-02 |
| 8193083 | Method of manufacturing semiconductor device and substrate processing apparatus | Sadayoshi Horii, Mika Karasawa | 2012-06-05 |
| 8026159 | Method of manufacturing semiconductor device and substrate processing apparatus | Sadayoshi Horii | 2011-09-27 |
| 6821871 | Method for manufacturing semiconductor device, substrate treatment method, and semiconductor manufacturing apparatus | Hisashi Nomura, Yushin Takasawa, Hajime Karasawa, Tadanori Yoshida, Kenichi Yamaguchi | 2004-11-23 |