Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9074284 | Heat treatment apparatus | Masanao Fukuda, Kenji Shirako, Akihiro Sato, Kazuhiro Morimitsu | 2015-07-07 |
| 8889533 | Method of manufacturing semiconductor device, method of manufacturing substrate and substrate processing apparatus | Takafumi Sasaki, Yoshinori Imai, Koei KURIBAYASHI | 2014-11-18 |
| 8679989 | Method of manufacturing semiconductor device including removal of deposits from process chamber and supply portion | Takahiro Maeda, Kiyohiko Maeda, Kenji Kameda, Yushin Takasawa | 2014-03-25 |
| 8450220 | Substrate processing apparatus , method of manufacturing semiconductor device, and method of manufacturing substrate | Takafumi Sasaki, Yoshinori Imai, Koei KURIBAYASHI | 2013-05-28 |
| 8409352 | Method of manufacturing semiconductor device, method of manufacturing substrate and substrate processing apparatus | Koei KURIBAYASHI, Yoshinori Imai, Takafumi Sasaki | 2013-04-02 |
| 8246749 | Substrate processing apparatus and semiconductor device producing method | Jie Wang, Ryuji Yamamoto | 2012-08-21 |
| 7901206 | Heat-treating apparatus and method of producing substrates | Akira Morohashi, Iwao Nakamura, Ryota Sasajima, Keishin Yamazaki | 2011-03-08 |
| 7865070 | Heat treating apparatus | Iwao Nakamura, Naoto Nakamura | 2011-01-04 |
| 7667301 | Thermal treatment apparatus, method for manufacturing semiconductor device, and method for manufacturing substrate | Naoto Nakamura, Iwao Nakamura, Tomoharu SHIMADA, Kenichi Ishiguro | 2010-02-23 |
| 5989981 | Method of manufacturing SOI substrate | Terukazu Ohno, Toshiaki Tsuchiya, Tetsushi Sakai, Shinji Nakamura, Takemi Ueki +2 more | 1999-11-23 |
| 5918136 | SOI substrate and method of producing the same | Katsutoshi Izumi, Norihiko Ohwada, Tatsuhiko Katayama | 1999-06-29 |
| 5665613 | Method of making semiconductor device having SIMOX structure | Katsutoshi Izumi, Norihiko Ohwada, Tatsuhiko Katayama | 1997-09-09 |
| 5658809 | SOI substrate and method of producing the same | Katsutoshi Izumi, Norihiko Ohwada, Tatsuhiko Katayama | 1997-08-19 |