Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10290494 | Method of manufacturing semiconductor device and method of processing substrate | Takafumi Sasaki, Kazuhiro Yuasa | 2019-05-14 |
| 9412582 | Reaction tube, substrate processing apparatus, and method of manufacturing semiconductor device | Takafumi Sasaki, Kazuhiro Morimitsu, Eisuke Nishitani, Tetsuo Yamamoto | 2016-08-09 |
| 9084298 | Substrate processing apparatus including shielding unit for suppressing leakage of magnetic field | Yukitomo HIROCHI, Akinori Tanaka, Akihiro Sato, Takeshi Itoh, Daisuke Hara +2 more | 2015-07-14 |
| 9074284 | Heat treatment apparatus | Kenji Shirako, Akihiro Sato, Kazuhiro Morimitsu, Sadao Nakashima | 2015-07-07 |
| 9028614 | Substrate processing apparatus | Daisuke Hara, Takeshi Itoh, Takatomo Yamaguchi, Hiroaki Hiramatsu, Shuhei Saido +1 more | 2015-05-12 |
| 8901013 | Substrate processing apparatus, method of processing substrate and method of manufacturing semiconductor device | Kazuhiro Yuasa, Takafumi Sasaki, Yasuhiro Megawa, Masayoshi Minami | 2014-12-02 |