Issued Patents All Time
Showing 1–25 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11018033 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Yukitomo HIROCHI, Tetsuo Yamamoto, Yoshihiko YANAGISAWA, Shinya Sasaki, Noriaki MICHITA | 2021-05-25 |
| 10943806 | Substrate processing apparatus, method of manufacturing semiconductor device, and non- transitory computer-readable recording medium | Kazuyuki Toyoda, Tetsuo Yamamoto | 2021-03-09 |
| 10381241 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Noriaki MICHITA | 2019-08-13 |
| 10290494 | Method of manufacturing semiconductor device and method of processing substrate | Masanao Fukuda, Takafumi Sasaki | 2019-05-14 |
| 9997354 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yugo Orihashi, Atsushi Moriya, Naoharu Nakaiso | 2018-06-12 |
| 9685317 | Method of manufacturing semiconductor device, method of processing substrate, substrate processing apparatus, and recording medium | Naonori Akae | 2017-06-20 |
| 9518321 | Atomic layer deposition processing apparatus to reduce heat energy conduction | Mitsuro Tanabe, Yoshihiko YANAGISAWA, Masanori Sakai, Yasutoshi TSUBOTA | 2016-12-13 |
| 9437426 | Method of manufacturing semiconductor device | Naoharu Nakaiso, Yuki Kitahara | 2016-09-06 |
| 9190264 | Method of manufacturing semiconductor device, method of processing substrate and non-transitory computer readable recording medium | Naonori Akae, Masato Terasaki | 2015-11-17 |
| 9055900 | Specimen measurement device and specimen measurement system | — | 2015-06-16 |
| 8901013 | Substrate processing apparatus, method of processing substrate and method of manufacturing semiconductor device | Masanao Fukuda, Takafumi Sasaki, Yasuhiro Megawa, Masayoshi Minami | 2014-12-02 |
| 8822350 | Method of manufacturing semiconductor device, substrate processing method and substrate processing apparatus | Ryuji Yamamoto | 2014-09-02 |
| 8448599 | Device for processing a substrate, method of processing a substrate and method of manufacturing semiconductor device | Kazuhiro Kimura, Yasuhiro Megawa | 2013-05-28 |
| 8084369 | Producing method of semiconductor device and substrate processing apparatus | Takashi Ozaki, Kiyohiko Maeda | 2011-12-27 |
| 8003411 | Device for processing a substrate, method of processing a substrate and method of manufacturing semiconductor device | Kazuhiro Kimura, Yasuhiro Megawa | 2011-08-23 |
| 7871938 | Producing method of semiconductor device and substrate processing apparatus | Takashi Ozaki, Kiyohiko Maeda | 2011-01-18 |
| 7713883 | Manufacturing method of a semiconductor device, and substrate processing apparatus | Yasuhiro Megawa | 2010-05-11 |
| 7682987 | Device for processing substrate and method of manufacturing semiconductor device | Kazuhiro Kimura, Yasuhiro Megawa | 2010-03-23 |
| 7534730 | Producing method of semiconductor device and substrate processing apparatus | Takashi Ozaki, Kiyohiko Maeda | 2009-05-19 |
| 6033818 | Developing device for an image forming apparatus | Toshihiro Sugiyama, Shuichi Endoh, Iwao Matsumae, Yoshiaki Tanaka, Hiroshi Hosokawa +6 more | 2000-03-07 |
| 5897243 | Electrophotographic recording apparatus configured to switch a bias voltage in a developing unit | Satoru Komatsubara, Eiji Takenaka, Mugijiroh Uno, Toshihiro Sugiyama, Tetsuo Yamanaka +1 more | 1999-04-27 |
| 5879752 | Method of coating a toner conveyor roller | Eisaku Murakami, Shuichi Endoh, Iwao Matsumae, Yoshiaki Tanaka, Hiroshi Hosokawa +6 more | 1999-03-09 |
| 5845183 | Developing device for an image forming apparatus | Toshihiro Sugiyama, Shuichi Endoh, Iwao Matsumae, Yoshiaki Tanaka, Hiroshi Hosokawa +6 more | 1998-12-01 |
| 5826144 | Developing device for an electrophotographic recording apparatus including bias control of a toner supplying roller | Eiji Takenaka, Shuichi Endoh, Iwao Matsumae, Yoshiaki Tanaka, Hiroshi Hosokawa +6 more | 1998-10-20 |
| 5768665 | Image forming apparatus with bias control to prevent undesirable toner deposition | Tetsuo Yamanaka, Shuichi Endoh, Iwao Matsumae, Yoshiaki Tanaka, Hiroshi Hosokawa +6 more | 1998-06-16 |