Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11264253 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Shinya Sasaki, Yukitomo HIROCHI | 2022-03-01 |
| 11018033 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Yukitomo HIROCHI, Kazuhiro Yuasa, Tetsuo Yamamoto, Yoshihiko YANAGISAWA, Shinya Sasaki | 2021-05-25 |
| 10804110 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transistory computer-readable recording medium | Shinya Sasaki | 2020-10-13 |
| 10381241 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kazuhiro Yuasa | 2019-08-13 |
| 9748132 | Substrate processing apparatus, method for manufacturing semiconductor device, method for processing substrates | Koichiro Harada, Tatsushi UEDA, Takayuki Sato | 2017-08-29 |