Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12392032 | Substrate processing apparatus with cleaning of exhaust system | Naofumi Ohashi, Tadashi Takasaki, Shun MATSUI | 2025-08-19 |
| 12255069 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Yukitomo HIROCHI, Takashi Nogami, Norichika Yamagishi | 2025-03-18 |
| 11309195 | Heating element, substrate processing apparatus and method of manufacturing semiconductor device | Yukitomo HIROCHI | 2022-04-19 |
| 11265977 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Yukitomo HIROCHI | 2022-03-01 |
| 11177143 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Yukitomo HIROCHI, Takashi Nogami | 2021-11-16 |
| 11127608 | Heating element, substrate processing apparatus, and method of manufacturing semiconductor device | — | 2021-09-21 |
| 11018033 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Yukitomo HIROCHI, Kazuhiro Yuasa, Tetsuo Yamamoto, Shinya Sasaki, Noriaki MICHITA | 2021-05-25 |
| 9546422 | Semiconductor device manufacturing method and substrate processing method including a cleaning method | Tetsuaki INADA | 2017-01-17 |
| 9518321 | Atomic layer deposition processing apparatus to reduce heat energy conduction | Mitsuro Tanabe, Kazuhiro Yuasa, Masanori Sakai, Yasutoshi TSUBOTA | 2016-12-13 |
| 8222161 | Substrate processing apparatus and semiconductor devices manufacturing method | Mitsuro Tanabe, Harunobu Sakuma, Tadashi Takasaki | 2012-07-17 |
| 8172950 | Substrate processing apparatus and semiconductor device producing method | Mitsuro Tanabe | 2012-05-08 |
| 7943528 | Substrate processing apparatus and semiconductor devices manufacturing method | Mitsuro Tanabe, Harunobu Sakuma, Tadashi Takasaki | 2011-05-17 |