Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387969 | Substrate processing apparatus, substrate holding apparatus, and method of manufacturing semiconductor device | Keishin Yamazaki | 2025-08-12 |
| 12255069 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Yukitomo HIROCHI, Takashi Nogami, Yoshihiko YANAGISAWA | 2025-03-18 |
| 7751922 | Semiconductor manufacturing apparatus and manufacturing of a semiconductor device | Makoto Hirano, Akihiro Yoshida | 2010-07-06 |