Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9587313 | Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium | Yuichi Wada, Hiroshi Ashihara, Hideto Tateno | 2017-03-07 |
| 9190299 | Apparatus for manufacturing semiconductor device, method of manufacturing semiconductor device, and recording medium | Yuichi Wada, Hiroshi Ashihara, Hideto Tateno | 2015-11-17 |
| 8222161 | Substrate processing apparatus and semiconductor devices manufacturing method | Yoshihiko YANAGISAWA, Mitsuro Tanabe, Tadashi Takasaki | 2012-07-17 |
| 7943528 | Substrate processing apparatus and semiconductor devices manufacturing method | Yoshihiko YANAGISAWA, Mitsuro Tanabe, Tadashi Takasaki | 2011-05-17 |
| 6875280 | Substrate processing apparatus and substrate processing method | Kazuhito Ikeda, Eisuke Nishitani, Kazuhiro Nakagomi | 2005-04-05 |
| 5795452 | Dry process system | Haruhisa Kinoshita, Osamu Matsumoto | 1998-08-18 |