Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368043 | Substrate processing apparatus, processing method, and non-transitory computer-readable recording medium | Akinori Tanaka, Sadayoshi Horii | 2025-07-22 |
| 12334401 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Satoshi Takano | 2025-06-17 |
| D1070797 | Furnace for substrate processing apparatus | Takatomo Yamaguchi, Daiki Kimoto | 2025-04-15 |
| D1053156 | Furnace for substrate processing apparatus | Takatomo Yamaguchi, Daiki Kimoto | 2024-12-03 |
| 12087598 | Substrate processing apparatus | Daisuke Hara, Masahisa Okuno, Takuya JODA, Takashi Tsukamoto, Akinori Tanaka +2 more | 2024-09-10 |
| 11869764 | Substrate processing apparatus, substrate processing method and non-transitory computer-readable recording medium | Akinori Tanaka, Sadayoshi Horii | 2024-01-09 |
| 11538716 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Tomoya Matsui, Makoto Hirano | 2022-12-27 |
| 11499224 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Tetsuaki INADA | 2022-11-15 |
| 11476112 | Substrate processing apparatus | Akinori Tanaka, Sadayoshi Horii | 2022-10-18 |
| D837706 | Exhaust pipe | Daisuke Hara | 2019-01-08 |
| D813065 | Gas sampling cell | Akinori Tanaka, Kimihiko Arimoto | 2018-03-20 |
| 9816182 | Substrate processing apparatus, method for manufacturing semiconductor device, and recording medium | Yuichi Wada, Hiroshi Ashihara, Keishin Yamazaki, Takurou Ushida, Iwao Nakamura +1 more | 2017-11-14 |
| 9793112 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Takuya JODA, Toru Kakuda, Masahisa Okuno | 2017-10-17 |
| D788704 | Heat insulating unit for substrate processing apparatus | Daisuke Hara | 2017-06-06 |
| D788705 | Heat insulating unit for substrate processing apparatus | Daisuke Hara | 2017-06-06 |
| D788706 | Heat insulating unit for substrate processing apparatus | Daisuke Hara | 2017-06-06 |
| D788038 | Heat insulating unit for substrate processing apparatus | Daisuke Hara | 2017-05-30 |
| 9587313 | Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium | Yuichi Wada, Hiroshi Ashihara, Harunobu Sakuma | 2017-03-07 |
| D778457 | Reaction tube | Daisuke Hara | 2017-02-07 |
| D778458 | Reaction tube | Daisuke Hara | 2017-02-07 |
| 9502239 | Substrate processing method, substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Masahisa Okuno, Tooru Kakuda, Takuya JODA, Masamichi KUROKAWA | 2016-11-22 |
| 9190299 | Apparatus for manufacturing semiconductor device, method of manufacturing semiconductor device, and recording medium | Yuichi Wada, Harunobu Sakuma, Hiroshi Ashihara | 2015-11-17 |
| D741823 | Vaporizer for substrate processing apparatus | Daisuke Hara, Masahisa Okuno, Takuya JODA | 2015-10-27 |