Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12087598 | Substrate processing apparatus | Hideto Tateno, Daisuke Hara, Takuya JODA, Takashi Tsukamoto, Akinori Tanaka +2 more | 2024-09-10 |
| 11168396 | Method of manufacturing semiconductor device and recording medium | Toru Kakuda, Katsuhiko Yamamoto, Takuya JODA, Sadayoshi Horii | 2021-11-09 |
| 9793112 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Takuya JODA, Toru Kakuda, Hideto Tateno | 2017-10-17 |
| 9646862 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Katsuyoshi Hamano, Atsushi UMEKAWA, Takuya JODA, Akinori Ishii | 2017-05-09 |
| 9502239 | Substrate processing method, substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Tooru Kakuda, Hideto Tateno, Takuya JODA, Masamichi KUROKAWA | 2016-11-22 |
| D741823 | Vaporizer for substrate processing apparatus | Hideto Tateno, Daisuke Hara, Takuya JODA | 2015-10-27 |
| 8987645 | Substrate processing apparatus having rotatable slot-type antenna and method of manufacturing semiconductor device using the same | Unryu Ogawa, Tokunobu Akao, Shinji Yashima, Atsushi UMEKAWA, Kaichiro MINAMI | 2015-03-24 |
| 8866271 | Semiconductor device manufacturing method, substrate processing apparatus and semiconductor device | Katsuhiko Yamamoto, Yuji Takebayashi, Tatsuyuki Saito | 2014-10-21 |
| 8557720 | Substrate processing apparatus and method of manufacturing a semiconductor device | Tokunobu Akao, Unryu Ogawa, Shinji Yashima, Atsushi UMEKAWA, Kaichiro MINAMI | 2013-10-15 |
| 8486222 | Substrate processing apparatus and method of manufacturing a semiconductor device | Tokunobu Akao, Unryu Ogawa, Shinji Yashima, Atsushi UMEKAWA, Kaichiro MINAMI | 2013-07-16 |