Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12014943 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Akinori Tanaka, Masahiro Miyake | 2024-06-18 |
| 11519815 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Akinori Tanaka, Masahiro Miyake | 2022-12-06 |
| 9171724 | Substrate processing apparatus and method for manufacturing semiconductor device | Atsushi UMEKAWA | 2015-10-27 |
| 8987645 | Substrate processing apparatus having rotatable slot-type antenna and method of manufacturing semiconductor device using the same | Unryu Ogawa, Masahisa Okuno, Tokunobu Akao, Atsushi UMEKAWA, Kaichiro MINAMI | 2015-03-24 |
| 8557720 | Substrate processing apparatus and method of manufacturing a semiconductor device | Tokunobu Akao, Unryu Ogawa, Masahisa Okuno, Atsushi UMEKAWA, Kaichiro MINAMI | 2013-10-15 |
| 8486222 | Substrate processing apparatus and method of manufacturing a semiconductor device | Tokunobu Akao, Unryu Ogawa, Masahisa Okuno, Atsushi UMEKAWA, Kaichiro MINAMI | 2013-07-16 |
| 8471477 | Substrate processing apparatus and method of manufacturing semiconductor device | Masayuki Tomita, Katsunori FUNAKI, Ryuichi Shimada | 2013-06-25 |
| 7045447 | Semiconductor device producing method and semiconductor device producing apparatus including forming an oxide layer and changing the impedance or potential to form an oxynitride | Unryu Ogawa, Naoya Yamakado, Tadashi Terasaki | 2006-05-16 |