Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12374527 | Substrate processing apparatus and method of manufacturing semiconductor device | Takeshi Yasui, Yasutoshi TSUBOTA, Koichiro Harada | 2025-07-29 |
| 12249485 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Takeshi Yasui, Masaki Murobayashi, Koichiro Harada | 2025-03-11 |
| 12154826 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masanori NAKAYAMA, Tatsushi UEDA, Yasutoshi TSUBOTA, Yuichiro TAKESHIMA, Hiroto IGAWA +1 more | 2024-11-26 |
| 12040161 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Yasutoshi TSUBOTA, Masanori NAKAYAMA, Tatsushi UEDA, Eiko TAKAMI, Yuichiro TAKESHIMA +3 more | 2024-07-16 |
| 11908682 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Hiroto IGAWA, Masanori NAKAYAMA, Tatsushi UEDA, Yasutoshi TSUBOTA, Eiko TAKAMI +2 more | 2024-02-20 |
| 11869748 | Substrate processing apparatus and method of manufacturing semiconductor device | Takeshi Yasui, Yasutoshi TSUBOTA, Koichiro Harada | 2024-01-09 |
| 11837440 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Takeshi Yasui, Masaki Murobayashi, Koichiro Harada | 2023-12-05 |
| 11664275 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masanori NAKAYAMA, Tatsushi UEDA, Yasutoshi TSUBOTA, Yuichiro TAKESHIMA, Hiroto IGAWA +1 more | 2023-05-30 |
| 11189483 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Yuichiro TAKESHIMA, Masanori NAKAYAMA, Yasutoshi TSUBOTA, Hiroto IGAWA | 2021-11-30 |
| 11152476 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Masanori NAKAYAMA, Yuichiro TAKESHIMA, Hiroto IGAWA | 2021-10-19 |
| 11081362 | Method of manufacturing semiconductor device, and recording medium | Yuki YAMAKADO, Masanori NAKAYAMA, Tatsushi UEDA, Yasutoshi TSUBOTA, Eiko TAKAMI +2 more | 2021-08-03 |
| 10796900 | Method of manufacturing semiconductor device | Yuichiro TAKESHIMA, Masanori NAKAYAMA, Yasutoshi TSUBOTA, Hiroto IGAWA | 2020-10-06 |
| 9059229 | Substrate processing apparatus and method of manufacturing semiconductor device | Tadashi Terasaki, Masanori NAKAYAMA, Mitsunori Takeshita | 2015-06-16 |
| 8471477 | Substrate processing apparatus and method of manufacturing semiconductor device | Masayuki Tomita, Shinji Yashima, Ryuichi Shimada | 2013-06-25 |