Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D937385 | Return nozzle | Shuhei Saido, Hidenari Yoshida, Yusaku OKAJIMA | 2021-11-30 |
| 10755962 | Substrate processing apparatus and method of manufacturing semiconductor device | Kazuya NABETA, Naoki Ukae | 2020-08-25 |
| 9305820 | Substrate processing apparatus and method of manufacturing semiconductor device | Kazuya NABETA, Naoki Ukae | 2016-04-05 |
| 9111972 | Substrate processing apparatus and manufacturing method for a semiconductor device | Tomoyuki Matsuda, Mitsuhiro Hirano, Akihiro Sato, Shinya Morita, Toshimitsu Miyata +1 more | 2015-08-18 |
| 9059229 | Substrate processing apparatus and method of manufacturing semiconductor device | Tadashi Terasaki, Masanori NAKAYAMA, Katsunori FUNAKI | 2015-06-16 |