Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10755962 | Substrate processing apparatus and method of manufacturing semiconductor device | Kazuya NABETA, Mitsunori Takeshita | 2020-08-25 |
| 9305820 | Substrate processing apparatus and method of manufacturing semiconductor device | Kazuya NABETA, Mitsunori Takeshita | 2016-04-05 |