Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10755962 | Substrate processing apparatus and method of manufacturing semiconductor device | Naoki Ukae, Mitsunori Takeshita | 2020-08-25 |
| 9842754 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Akira Takahashi, Takeshi Yasui, Hiroyuki Ogawa, Naoya Matsuura | 2017-12-12 |
| 9305820 | Substrate processing apparatus and method of manufacturing semiconductor device | Naoki Ukae, Mitsunori Takeshita | 2016-04-05 |