Issued Patents All Time
Showing 1–25 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12203167 | Substrate processing apparatus and method of manufacturing semiconductor device | Hidetoshi Mimura, Takafumi Sasaki, Yusaku OKAJIMA | 2025-01-21 |
| 12062546 | Substrate processing device, manufacturing method for semiconductor device, and reaction tube | Shigeru Odake, Tomoshi Taniyama, Takayuki Nakada | 2024-08-13 |
| 11990359 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Takatomo Yamaguchi, Kenji Ono | 2024-05-21 |
| 11952664 | Substrate processing apparatus and method of manufacturing semiconductor device | Takeo Hanashima, Hiroaki Hiramatsu | 2024-04-09 |
| 11898247 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Takafumi Sasaki, Yusaku OKAJIMA | 2024-02-13 |
| 11859280 | Substrate processing apparatus and method of manufacturing semiconductor device | Hidetoshi Mimura, Takafumi Sasaki, Yusaku OKAJIMA | 2024-01-02 |
| 11685992 | Substrate processing apparatus, quartz reaction tube and method of manufacturing semiconductor device | Yusaku OKAJIMA, Takafumi Sasaki, Shuhei Saido, Mitsunori Ishisaka, Hidetoshi Mimura | 2023-06-27 |
| 11542601 | Substrate processing apparatus and method of manufacturing semiconductor device | Takeo Hanashima, Hiroaki Hiramatsu | 2023-01-03 |
| 11495477 | Substrate processing apparatus | Shuhei Saido, Takatomo Yamaguchi, Takayuki Nakada, Tomoshi Taniyama | 2022-11-08 |
| 11453942 | Substrate processing apparatus and method of manufacturing semiconductor device | Hidetoshi Mimura, Takafumi Sasaki, Yusaku OKAJIMA | 2022-09-27 |
| 11222796 | Substrate processing apparatus | Shuhei Saido, Takatomo Yamaguchi, Takayuki Nakada, Tomoshi Taniyama | 2022-01-11 |
| D937385 | Return nozzle | Mitsunori Takeshita, Shuhei Saido, Yusaku OKAJIMA | 2021-11-30 |
| 11155920 | Substrate processing apparatus, and method for manufacturing semiconductor device | Tomoshi Taniyama, Takayuki Nakada | 2021-10-26 |
| D928106 | Supporting column of insulation unit for semiconductor manufacturing apparatus | Yusaku OKAJIMA, Shuhei Saido | 2021-08-17 |
| 11001924 | Substrate processing apparatus, nozzle base, and manufacturing method for semiconductor device | — | 2021-05-11 |
| D916037 | Cover of seal cap for reaction chamber for semiconductor | Yusaku OKAJIMA, Shuhei Saido, Takafumi Sasaki | 2021-04-13 |
| 10961625 | Substrate processing apparatus, reaction tube and method of manufacturing semiconductor device | Shuhei Saido, Takafumi Sasaki, Yusaku OKAJIMA | 2021-03-30 |
| 10950457 | Substrate processing device, manufacturing method for semiconductor device, and reaction tube | Shigeru Odake, Tomoshi Taniyama, Takayuki Nakada | 2021-03-16 |
| 10923366 | Substrate processing apparatus and method of manufacturing semiconductor device | Yusaku OKAJIMA, Shuhei Saido, Takafumi Sasaki | 2021-02-16 |
| 10808318 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Takeo Hanashima, Tsukasa Kamakura, Takafumi Sasaki | 2020-10-20 |
| 10811271 | Substrate processing device, manufacturing method for semiconductor device, and reaction tube | Shigeru Odake, Tomoshi Taniyama, Takayuki Nakada | 2020-10-20 |
| 10731254 | Protective plate, substrate processing apparatus, and method of manufacturing semiconductor device | Shuhei Saido, Yusaku OKAJIMA | 2020-08-04 |
| 10689758 | Substrate processing apparatus, and method for manufacturing semiconductor device | Tomoshi Taniyama, Takayuki Nakada | 2020-06-23 |
| 10615061 | Substrate processing apparatus | Shuhei Saido, Takatomo Yamaguchi, Takayuki Nakada, Tomoshi Taniyama | 2020-04-07 |
| D872037 | Cover of seal cap for reaction chamber for semiconductor manufacturing | Yusaku OKAJIMA, Shuhei Saido, Takafumi Sasaki | 2020-01-07 |