Issued Patents All Time
Showing 26–44 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10453735 | Substrate processing apparatus, reaction tube, semiconductor device manufacturing method, and recording medium | Yusaku OKAJIMA, Shuhei Saido, Takafumi Sasaki | 2019-10-22 |
| D855027 | Cover of seal cap for reaction chamber of semiconductor | Yusaku OKAJIMA, Shuhei Saido | 2019-07-30 |
| D847105 | Boat of substrate processing apparatus | Yusaku OKAJIMA | 2019-04-30 |
| D847301 | Return nozzle | Takafumi Sasaki, Shuhei Saido | 2019-04-30 |
| D846514 | Boat of substrate processing apparatus | Yusaku OKAJIMA | 2019-04-23 |
| D843958 | Reaction tube | Yusaku OKAJIMA, Shuhei Saido, Takafumi Sasaki, Hidetoshi Mimura | 2019-03-26 |
| D842823 | Reaction tube | Yusaku OKAJIMA, Shuhei Saido, Takafumi Sasaki, Hidetoshi Mimura | 2019-03-12 |
| D839219 | Boat for substrate processing apparatus | Toru Kagaya, Atsushi Hirano | 2019-01-29 |
| 9957616 | Substrate processing apparatus and heating unit | Hitoshi Murata, Yuichi Wada, Takashi Yahata, Shuhei Saido | 2018-05-01 |
| D793975 | Heater for semiconductor thermal process | Hitoshi Murata, Yuichi Wada, Takashi Yahata, Shuhei Saido | 2017-08-08 |
| D791090 | Reaction tube | Tomoshi Taniyama | 2017-07-04 |
| D772824 | Reaction tube | Tomoshi Taniyama | 2016-11-29 |
| D770993 | Reaction tube | Tomoshi Taniyama | 2016-11-08 |
| D747279 | Boat for substrate processing apparatus | Tomoshi Taniyama | 2016-01-12 |
| D738329 | Boat for substrate processing apparatus | Tomoshi Taniyama | 2015-09-08 |
| D737785 | Boat for substrate processing apparatus | Tomoshi Taniyama | 2015-09-01 |
| 9111748 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer readable recording medium | Daigo YAMAGUCHI, Tsuyoshi Takeda, Taketoshi Sato | 2015-08-18 |
| D734730 | Boat of substrate processing apparatus | Tomoshi Taniyama | 2015-07-21 |
| 8791031 | Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus | Tomoshi Taniyama | 2014-07-29 |