Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1020668 | Gas injector for substrate processing apparatus | Yoshimasa NAGATOMI | 2024-04-02 |
| D992762 | Protector for maintenance on semiconductor manufacturing equipments | — | 2023-07-18 |
| D925481 | Inlet liner for substrate processing apparatus | Shinya Ebata | 2021-07-20 |
| D901406 | Inner tube of reactor for semiconductor fabrication | Atsushi UMEKAWA | 2020-11-10 |
| D889596 | Gas nozzle for substrate processing apparatus | Yusaku OKAJIMA, Hiroaki Hiramatsu, Shinya Ebata | 2020-07-07 |
| D888196 | Gas nozzle for substrate processing apparatus | Yusaku OKAJIMA, Hiroaki Hiramatsu, Shinya Ebata | 2020-06-23 |
| D853979 | Reaction tube | Shinya Ebata, Yusaku OKAJIMA, Hiroaki Hiramatsu | 2019-07-16 |
| D839219 | Boat for substrate processing apparatus | Hidenari Yoshida, Atsushi Hirano | 2019-01-29 |
| 8598047 | Substrate processing apparatus and producing method of semiconductor device | Masanori Sakai, Hirohisa Yamazaki | 2013-12-03 |
| 8366868 | Substrate processing apparatus | Kazuyuki Okuda, Masanori Sakai | 2013-02-05 |
| 8261692 | Substrate processing apparatus and reaction container | Tadashi Kontani, Kazuyuki Toyoda, Taketoshi Sato, Nobuhito Shima, Nobuo Ishimaru +5 more | 2012-09-11 |
| 8211802 | Substrate processing apparatus | Kazuyuki Okuda, Masanori Sakai | 2012-07-03 |
| 8047158 | Substrate processing apparatus and reaction container | Tadashi Kontani, Kazuyuki Toyoda, Taketoshi Sato, Nobuhito Shima, Nobuo Ishimaru +5 more | 2011-11-01 |
| 7900580 | Substrate processing apparatus and reaction container | Tadashi Kontani, Kazuyuki Toyoda, Taketoshi Sato, Nobuhito Shima, Nobuo Ishimaru +5 more | 2011-03-08 |
| 7713582 | Substrate processing method for film formation | Masanori Sakai, Nobuhito Shima | 2010-05-11 |
| 7622396 | Method of producing a semiconductor device | Kazuyuki Okuda, Yasushi Yagi, Masanori Sakai | 2009-11-24 |
| 6905549 | Vertical type semiconductor device producing apparatus | Kazuyuki Okuda, Yasushi Yagi, Masanori Sakai | 2005-06-14 |