Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12249502 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Kazuki NONOMURA, Kenichi Suzaki | 2025-03-11 |
| 12000045 | Method of manufacturing semiconductor device, non-transitory computer-readable recording medium, substrate processing apparatus and substrate processing method | Takuya JODA, Yukinao KAGA | 2024-06-04 |
| 11970771 | Vaporizer, substrate processing apparatus and method for manufacturing semiconductor device | Atsushi Morikawa, Masakazu Shimada, Takeshi Kasai, Kenichi Suzaki, Hirohisa Yamazaki | 2024-04-30 |
| D1020668 | Gas injector for substrate processing apparatus | Toru Kagaya | 2024-04-02 |
| 11293096 | Substrate processing apparatus, method for manufacturing semiconductor device and vaporizer | Atsushi Morikawa, Masakazu Shimada, Takeshi Kasai, Kenichi Suzaki, Hirohisa Yamazaki | 2022-04-05 |
| 10910217 | Method for manufacturing semiconductor device, non-transitory computer-readable recording medium, and substrate processing apparatus | Hirohisa Yamazaki | 2021-02-02 |
| 10707074 | Method for manufacturing semiconductor device, non-transitory computer-readable recording medium, and substrate processing apparatus | Hirohisa Yamazaki | 2020-07-07 |