Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12000045 | Method of manufacturing semiconductor device, non-transitory computer-readable recording medium, substrate processing apparatus and substrate processing method | Takuya JODA, Yoshimasa NAGATOMI | 2024-06-04 |
| 11876010 | Substrate processing apparatus and recording medium | Tadashi Okazaki, Hajime ABIKO, Tomoyuki Miyada | 2024-01-16 |
| 11854850 | Substrate processing apparatus, method of manufacturing semiconductor device, method of loading substrate and non-transitory computer-readable recording medium | Ryosuke YOSHIDA | 2023-12-26 |
| 11031270 | Substrate processing apparatus, substrate holder and mounting tool | Atsushi Hirano, Yuji Takebayashi, Masanori Sakai, Masakazu Shimada | 2021-06-08 |
| 11004676 | Method for manufacturing semiconductor device, non-transitory computer-readable recording medium, and substrate processing apparatus | Arito OGAWA, Kazuhiro Harada, Motomu DEGAI | 2021-05-11 |
| 10640869 | Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Kazuyuki Okuda, Masayoshi Minami, Yoshinobu Nakamura, Kosuke Takagi, Yuji Takebayashi | 2020-05-05 |
| 10622213 | Method of manufacturing semiconductor device | — | 2020-04-14 |
| 10559485 | Method of manufacturing semiconductor device, method of loading substrate and non-transitory computer-readable recording medium | Ryosuke YOSHIDA | 2020-02-11 |
| 10388530 | Method of manufacturing semiconductor device and substrate processing apparatus | Arito OGAWA, Kazuhiro Harada, Hideharu Itatani, Hiroshi Ashihara | 2019-08-20 |
| 10366894 | Method of manufacturing semiconductor device, substrate processing device, and recording medium | Arito OGAWA | 2019-07-30 |
| 9972500 | Method of manufacturing semiconductor device | Arito OGAWA, Atsuro SEINO, Atsuhiko Ashitani, Ryohei Maeno, Masanori Sakai | 2018-05-15 |
| 9650715 | Method of forming metal-containing film | Tatsuyuki Saito, Masanori Sakai, Takashi Yokogawa | 2017-05-16 |
| 9508555 | Method of manufacturing semiconductor device | Arito OGAWA, Atsuro SEINO, Atsuhiko Ashitani, Ryohei Maeno, Masanori Sakai | 2016-11-29 |
| 9472398 | Method of manufacturing semiconductor device and substrate processing apparatus | Tatsuyuki Saito, Masanori Sakai, Takashi Yokogawa | 2016-10-18 |
| 9466477 | Method of manufacturing semiconductor device, substrate processing apparatus, and semiconductor device | Tatsuyuki Saito, Masanori Sakai, Takashi Yokogawa | 2016-10-11 |
| 9416446 | Semiconductor device manufacturing method and substrate processing apparatus | Tatsuyuki Saito, Masanori Sakai, Takashi Yokogawa | 2016-08-16 |
| 9340873 | Semiconductor device manufacturing method and substrate processing apparatus | Tatsuyuki Saito, Masanori Sakai, Takashi Yokogawa | 2016-05-17 |
| 9263269 | Reaction tube, substrate processing apparatus and method of manufacturing semiconductor device | Satoshi Okada, Kosuke Takagi | 2016-02-16 |
| 9238257 | Method of manufacturing semiconductor device, cleaning method, and substrate processing apparatus | Masanori Sakai, Takashi Yokogawa, Tatsuyuki Saito | 2016-01-19 |
| 9045825 | Method of forming metal-containing film | Tatsuyuki Saito, Masanori Sakai, Takashi Yokogawa | 2015-06-02 |
| 8808455 | Substrate processing apparatus and method of manufacturing semiconductor device | Tatsuyuki Saito, Masanori Sakai, Takashi Yokogawa | 2014-08-19 |
| 8691708 | Method of manufacturing semiconductor device and substrate processing apparatus | Tatsuyuki Saito, Masanori Sakai, Takashi Yokogawa | 2014-04-08 |
| 8410001 | Method of manufacturing semiconductor device, method of processing substrate, and substrate processing apparatus | Yushin Takasawa, Yoshiro Hirose, Tsukasa Kamakura | 2013-04-02 |