Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11876010 | Substrate processing apparatus and recording medium | Tadashi Okazaki, Tomoyuki Miyada, Yukinao KAGA | 2024-01-16 |
| 11869785 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Tomoyuki Miyada, Junichi KAWASAKI, Tadashi Okazaki | 2024-01-09 |
| 11257699 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Tomoyuki Miyada, Junichi KAWASAKI, Tadashi Okazaki | 2022-02-22 |
| 10062592 | Substrate processing apparatus | Junichi KAWASAKI | 2018-08-28 |
| 9558976 | Substrate processing apparatus, method of transferring substrate, method of manufacturing semiconductor device, and state detecting program | Junichi KAWASAKI | 2017-01-31 |