Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347625 | Multilayer ceramic capacitor | Hironori TSUTSUMI, Shoji Fukui, Mitsuru Ikeda | 2025-07-01 |
| 12080149 | Processing apparatus, display method, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Masanori OKUNO, Shinichiro Mori, Yasuhiro Joho, Satomi YAMAZAKI | 2024-09-03 |
| 11869785 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Tomoyuki Miyada, Hajime ABIKO, Tadashi Okazaki | 2024-01-09 |
| 11257699 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Tomoyuki Miyada, Hajime ABIKO, Tadashi Okazaki | 2022-02-22 |
| 11152782 | Drive device | Kento Yamashita | 2021-10-19 |
| 10062592 | Substrate processing apparatus | Hajime ABIKO | 2018-08-28 |
| 9960065 | Substrate processing apparatus for managing transfer state of substrate gas storage container based on supply flow rate | Mitsuru Funakura | 2018-05-01 |
| 9558976 | Substrate processing apparatus, method of transferring substrate, method of manufacturing semiconductor device, and state detecting program | Hajime ABIKO | 2017-01-31 |
| 8874259 | Substrate processing apparatus and method of processing error of substrate processing apparatus | — | 2014-10-28 |
| 8682483 | Display method for substrate processing apparatus | — | 2014-03-25 |
| 8352069 | Substrate processing apparatus and display method for substrate processing apparatus | — | 2013-01-08 |