Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11876010 | Substrate processing apparatus and recording medium | Tadashi Okazaki, Hajime ABIKO, Yukinao KAGA | 2024-01-16 |
| 11869785 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Hajime ABIKO, Junichi KAWASAKI, Tadashi Okazaki | 2024-01-09 |
| 11257699 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Hajime ABIKO, Junichi KAWASAKI, Tadashi Okazaki | 2022-02-22 |
| 10132757 | Substrate processing device | Masanori OKUNO, Hisaki Kataoka | 2018-11-20 |