Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12371782 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Tatsuya Yotsutani, Masaya NAGATO, Toshihiko Yonejima | 2025-07-29 |
| 12365982 | Processing apparatus and exhaust system | Toshihiko Yonejima, Masakazu Sakata, Masamichi YACHI | 2025-07-22 |
| 12341000 | Substrate processing apparatus and recording medium | Hideki Horita, Kazuyoshi Yamamoto, Kazuhide Asai, Toshihiko Yonejima | 2025-06-24 |
| 12080149 | Processing apparatus, display method, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Junichi KAWASAKI, Shinichiro Mori, Yasuhiro Joho, Satomi YAMAZAKI | 2024-09-03 |
| 11966210 | Substrate processing apparatus, device management controller, and recording medium | Kazuhide Asai, Kazuyoshi Yamamoto, Hidemoto Hayashihara, Takayuki KAWAGISHI, Kayoko Yashiki +4 more | 2024-04-23 |
| 11827982 | Processing apparatus | Toshihiko Yonejima | 2023-11-28 |
| 11236743 | Substrate processing apparatus and recording medium | Hideki Horita, Kazuyoshi Yamamoto, Kazuhide Asai, Toshihiko Yonejima | 2022-02-01 |
| 11237538 | Substrate processing apparatus, device management controller, and recording medium | Kazuhide Asai, Kazuyoshi Yamamoto, Hidemoto Hayashihara, Takayuki KAWAGISHI, Kayoko Yashiki +4 more | 2022-02-01 |
| 10163663 | Substrate processing apparatus, exhaust system and method of manufacturing semiconductor device | Toshihiko Yonejima, Masakazu Sakata, Hiroki OKAMIYA, Takeshi Kasai, Katsuaki NOGAMI +6 more | 2018-12-25 |
| 10132757 | Substrate processing device | Hisaki Kataoka, Tomoyuki Miyada | 2018-11-20 |
| 8527078 | Test terminal and setup system including the same of substrate processing apparatus | — | 2013-09-03 |
| 8295968 | Setup method of substrate processing apparatus | — | 2012-10-23 |