Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11060190 | Substrate processing apparatus and control system | Kazuo NAKAYA | 2021-07-13 |
| 10163663 | Substrate processing apparatus, exhaust system and method of manufacturing semiconductor device | Toshihiko Yonejima, Masanori OKUNO, Masakazu Sakata, Takeshi Kasai, Katsuaki NOGAMI +6 more | 2018-12-25 |