Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12371782 | Method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Masanori OKUNO, Tatsuya Yotsutani, Masaya NAGATO | 2025-07-29 |
| 12365982 | Processing apparatus and exhaust system | Masanori OKUNO, Masakazu Sakata, Masamichi YACHI | 2025-07-22 |
| 12341000 | Substrate processing apparatus and recording medium | Masanori OKUNO, Hideki Horita, Kazuyoshi Yamamoto, Kazuhide Asai | 2025-06-24 |
| 11827982 | Processing apparatus | Masanori OKUNO | 2023-11-28 |
| 11236743 | Substrate processing apparatus and recording medium | Masanori OKUNO, Hideki Horita, Kazuyoshi Yamamoto, Kazuhide Asai | 2022-02-01 |
| 10163663 | Substrate processing apparatus, exhaust system and method of manufacturing semiconductor device | Masanori OKUNO, Masakazu Sakata, Hiroki OKAMIYA, Takeshi Kasai, Katsuaki NOGAMI +6 more | 2018-12-25 |